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- Article name
- EXPERIMENTAL STUDY OF AGGLOMERATION NANOPARTICLES AT CHANGES OF HUMIDITY IN THE PURE PREMISES OF MICROELECTRONICS
- Authors
- SEVRYUKOVA E. A., , melaly@rambler.ru, National Research University of Electronic Technology, "MIET", Moscow, Russia
Karakeyan V. I., , zelikar@mail.ru, National Research University of Electronic Technology, Moscow, Russia
- Keywords
- nanoparticles / HEPA filters / coagulation / aerosol / air / measurement / control / concentration / premises / instrument / size / counter
- Year
- 2011 Issue 3 Pages 56 - 58
- Code EDN
- Code DOI
- Abstract
- The results of experimental studies on the behavior of nanoparticles in the pure premise of microelectronics at work HEPA-filter in different spatial directions, as well as changes in the concentration of nanoparticles from the microclimate parameters (temperature, humidity) are presented.
- Text
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