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- Article name
- ANALYSIS OF AEROSOL VARIABILITY WHEN THE HUMIDITY AND THE IDENTIFICATION OF ADVERSE ZONES IN CLEAN AREAS OF MICROELECTRONICS
- Authors
- SEVRYUKOVA E. A., , melaly@rambler.ru, National Research University of Electronic Technology, "MIET", Moscow, Russia
- Keywords
- coagulation / aerosol / air / measurement / control / concentration / room size
- Year
- 2012 Issue 2 Pages 30 - 33
- Code EDN
- Code DOI
- Abstract
- This article describes the results of experimental studies on behavior of aerosol in a clean room of microelectronics, taking into account the placement of technological equipment, personnel conduct when the microclimate parameters (temperature, humidity).
- Text
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