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- Article name
- MEASUREMENT AND VISUALIZATION OF AIR FLOW IN CLEAN AREAS OF MICROELECTRONICS
- Authors
- SEVRYUKOVA E. A., , melaly@rambler.ru, National Research University of Electronic Technology, "MIET", Moscow, Russia
- Keywords
- coagulation / aerosol / air / measurement / control / concentration / room size
- Year
- 2012 Issue 2 Pages 18 - 20
- Code EDN
- Code DOI
- Abstract
- The article is devoted to the study of air flow visualization method using computer modelling, taking into account the location of the equipment, staff movement, sampling points in clean areas of microelectronics.
- Text
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