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- Article name
- SrTiO3 nanocomposite films on Si (001) substrates
- Authors
- PAVLENKO A. V., , antvpr@mail.ru, Research Institute of Physics Southern Federal University; Federal Research Center Southern Scientific Center of the RAS, Rostov-on-Don, Russia
ZHIDEL K. M., , karinagidele@gmail.com, Research Institute of Physics Southern Federal University, Rostov-on-Don, Russia
- Keywords
- composite films / structure / optical constants / dielectric properties / surface roughness / non-destructive testing
- Year
- 2021 Issue 4 Pages 30 - 34
- Code EDN
- Code DOI
- 10.52190/2073-2562_2021_4_30
- Abstract
- The results of studying the structure, dielectric, and optical properties of STO thin films grown by RF cathodic sputtering in an oxygen atmosphere on Si (001) substrates are presented. It was shown that the films have weak absorption, the normal dispersion of the refractive index, and interdiffusion layers at the interfaces.
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