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- Article name
- NEW ASPECTS IN THE TECHNOLOGY OF PRODUCTION OF ELECTRONS OF RADIO ELECTRONICS ON THE BASIS OF THE GLOW DISCHARGE
- Authors
- Grachev V. I., , vlgrachev@mail.ru, Scientific & Industrial Company "AVERS", Moscow, Russia
Margolin V. I., , v.margolin@mail.ru, Saint-Petersburg State Electrotechnical University "LETI", Saint-Petersburg, Russia
Tupik V. A., , VATupik@etu.ru, Saint-Petersburg State Electrotechnical University "LETI", Saint-Petersburg, Russia
- Keywords
- projection electron-beam lithography / cathode-mask / secondary ion-electron emission / nanolithography / fractal films
- Year
- 2017 Issue 2 Pages 63 - 66
- Code EDN
- Code DOI
- Abstract
- This paper examines the problems of applying the methods of secondary ion-electron emission to transfer an image in systems of projection electron-beam lithography in order to developing fractal antennae on the basis of films with a fractal structure. The results of the experimental studies and analysis of data in the literature are given.
- Text
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