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- Article name
- PHYSICOTECHNOLOGICAL BASES SEMI-CONDUCTOR NANOTECHNOLOGY
- Authors
- Vigdorovich V. N., , vilenin@yandex.ru, Institute of Chemical Problems for Microelectronic, Moscow, Russia
Markov F. V., , f.markov@bk.ru, Moscow State Institute of Electronic Technique (Technical University), Moscow, Russia
Sadykov E., , , Osh State University, Osh, the Kyrgyzstan
Tashpolotov Y., , itashpolotov@rambler.ru, Osh State University, Osh, the Kyrgyzstan
- Keywords
- nanotechnology / reactor / liquid-phase epitaxy / thermal effusion / heterostructure
- Year
- 2014 Issue 3 Pages 77 - 80
- Code EDN
- Code DOI
- Abstract
- The method of liquid phase epitaxy usingthermal effusion that is more simple and cheap enough modern technology of semiconductor heterostructures and can be used to create high-quality structures for physics research and for device applications.
- Text
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